JPH0221578U - - Google Patents
Info
- Publication number
- JPH0221578U JPH0221578U JP10021088U JP10021088U JPH0221578U JP H0221578 U JPH0221578 U JP H0221578U JP 10021088 U JP10021088 U JP 10021088U JP 10021088 U JP10021088 U JP 10021088U JP H0221578 U JPH0221578 U JP H0221578U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- probe
- probe head
- electromagnet
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10021088U JPH0221578U (en]) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10021088U JPH0221578U (en]) | 1988-07-28 | 1988-07-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0221578U true JPH0221578U (en]) | 1990-02-13 |
Family
ID=31328083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10021088U Pending JPH0221578U (en]) | 1988-07-28 | 1988-07-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0221578U (en]) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07240444A (ja) * | 1994-02-25 | 1995-09-12 | Aging Tesuta Kaihatsu Kyodo Kumiai | 半導体チップ試験装置 |
JP2001249167A (ja) * | 2000-03-06 | 2001-09-14 | Tokyo Weld Co Ltd | 測定プローブ駆動装置 |
-
1988
- 1988-07-28 JP JP10021088U patent/JPH0221578U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07240444A (ja) * | 1994-02-25 | 1995-09-12 | Aging Tesuta Kaihatsu Kyodo Kumiai | 半導体チップ試験装置 |
JP2001249167A (ja) * | 2000-03-06 | 2001-09-14 | Tokyo Weld Co Ltd | 測定プローブ駆動装置 |
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